Why Electrostatic Discharge is Bad for Business

Much like a bolt of lightning can strike in one spot and travel, creating a path of destruction in its wake, a single electrostatic discharge can have a similar effect on a semiconductor manufacturer’s bottom line. For advanced-node manufacturers, the risk posed by electrostatic discharge has become amplified by the move to fluoropolymers, a consequence of stainless- steel process tool components failing to meet increased purity requirements. In this paper, we will look at new electrostatic discharge challenges posed by the introduction of PFA-based fluoropolymer chemical delivery systems into the manufacturing environment and offer innovative approaches to mitigate the problems.

This paper looks at new electrostatic discharge challenges posed by the introduction of PFA-based fluoropolymer chemical delivery systems into the manufacturing environment and offers innovative approaches to mitigate the problems.