Read How STMicroelectronics Reduced On-Wafer Defectivity in Lithography

Case STudy

In today’s microelectronics manufacturing facilities, Advanced Fault Detection Classification (FDC) is required even more to guarantee quality in terms of process stability, defect reduction, and tighter uniformity.

Our customer, STMicroelectronics, was struggling with an old and aging resist dispense pump installed base.

Entegris proposed they evaluate the IntelliGen® LV two-stage technology dispense system.

Discover how STMicroelectronics has achieved with Entegris’ solution:

  • Three times lower wafer defectivity
  • 30% tighter wafer dispense uniformity
  • Stability over six months of operation

This case study looks at how to effectively collect data to improve your process control strategy and lower defectivity.