SEMICON Taiwan 2022 - Event Content
JOIN ENTEGRIS AT BOOTH: # 0148 4TH FLOOR, TAIPEI NANGANG EXHIBITION HALL
Purity and Safety: How to Select the Right Container System for Safe, Clean Chemical Delivery
Pictorial explaining how to select the right container system when chemicals are particularly susceptible to contamination introduced while in storage or during transport and our storage/transport containers and connection systems.
Chasing the Perfect Pattern
The factors that can negatively influence lithography patterns include the purity of the chemicals, water, gases, as well as ambient and tool air that contacts wafers during transport and active processing areas. Material compatibility, temperature, humidity, and overall cleanliness of the tool and ambient environments also influence patterning throughout the chip manufacturing process. Controlling these influences is critical to creating the intended circuit patterns.