Future Development Challenges for Post-CMP Cleaning

Future Dev Challenges for Post CMP

This presentation discusses how increasing use of new materials corresponds to increasing cleaning complexity and challenges associated. 

 

AGENDA

Future Challenges in PCMP Cleaning

  • Introduction
  • Future trends and challenges
  • Cu PCMP
  • Co PCMP
  • W/dielectric/silicaPCMP
  • CeO2PCMP
  • Summary