Ammonia cross contamination: FOUP to wafer evaluation and their volatile acids comparison

Ammonia Cross Contamination FOUP

FOUP's appearance in terms of AMC cross-contamination must be assessed by wafer exposure.

 

AGENDA:

  • Introduction

  • Issues/objectives

  • Experimental protocol

  • Results

    • Contaminant sorption by the FOUPs

    • Contaminant outgassing from the FOUPs

    • Contaminant transfer to wafers

  • Conclusions