Ammonia cross contamination: FOUP to wafer evaluation and their volatile acids comparison

Ammonia Cross Contamination FOUP

AGENDA:

  • Introduction
  • Issues/objectives
  • Experimental protocol
  • Results
    • Contaminant sorption by the FOUPs
    • Contaminant outgassing from the FOUPs
    • Contaminant transfer to wafers
  • Conclusions