---
title: "Ammonia cross contamination: FOUP to wafer evaluation and their volatile acids comparison"
description: FOUP's appearance in terms of AMC cross-contamination must be assessed by wafer exposure.
image: https://info.entegris.com/hubfs/Ammonia%20Cross%20Contamination%20FOUP.jpg
---

<https://www.entegris.com/content/entegris-live/en/home.html>

![desktop-hero-corp-overview](https://info.entegris.com/hubfs/Entegris_Aug2019/Images/desktop-hero-corp-overview.jpg)

# Ammonia Cross Contamination: FOUP to Wafer Evaluation and their Volatile Acids Comparison

# Ammonia cross contamination: FOUP to wafer evaluation and their volatile acids comparison

![Ammonia Cross Contamination FOUP](https://info.entegris.com/hs-fs/hubfs/Ammonia%20Cross%20Contamination%20FOUP.jpg?width=720&name=Ammonia%20Cross%20Contamination%20FOUP.jpg "Ammonia Cross Contamination FOUP")

***AGENDA:***

- Introduction
- Issues/objectives
- Experimental protocol
- Results
- Conclusions

### Register to Download the Presentation

- [![Facebook](https://info.entegris.com/hubfs/Entegris_Aug2019/Images/facebook.svg)](https://www.facebook.com/EntegrisInc)
- [![Twitter](https://info.entegris.com/hubfs/Entegris_Aug2019/Images/x-logo.svg)](https://twitter.com/Entegris)
- [![YouTube](https://info.entegris.com/hubfs/Entegris_Aug2019/Images/youtube.svg)](https://www.youtube.com/user/EntegrisInc)
- [![LinkedIn](https://info.entegris.com/hubfs/Entegris_Aug2019/Images/linkedin.svg)](https://www.linkedin.com/company/entegris)
- [![Instagram](https://info.entegris.com/hubfs/Entegris_Aug2019/Images/instagram.svg)](https://www.instagram.com/entegrisinc/)

- [Privacy Policy](https://www.entegris.com/content/entegris-live/en/home/about-us/legal-trademark-notices/privacy-policy.html)
- [Terms & Conditions](https://www.entegris.com/content/entegris-live/en/home/about-us/legal-trademark-notices/terms-and-conditions-of-sale.html)
- [Legal & Trademark Notices](https://www.entegris.com/content/entegris-live/en/home/about-us/legal-trademark-notices.html)

© 1994-2026 Entegris, Inc. All Rights Reserved.