H2 Generator for Ion Implant: Gas Mixture Delivery Via Cylinder Improves Ion Implant Integrity

Technical Paper

Hydrogen generators appear to save money, but an in-situ approach could create long term issues that affect productivity and increase equipment downtime

Semiconductor manufacturers who decide to generate their own gas mixtures (within their ion implant tools) rather than using pre-mixed cylinders may want to reconsider. It may not be as cost effective in the long run, and it could impair equipment and reduce productivity.
An in-situ gas mixture for an ion implant tool may require additional equipment downtime, which means cost savings are off-set by lost production hours and maintenance downtime. This paper discusses the myriad of requirements associated with running a hydrogen generator and the overall cost of ownership impact that needs to be considered for an ion implant tool.